基于MEMS应用的压电薄膜电学和机电特性研究

2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics Pub Date : 2007-05-27 DOI:10.1109/ISAF.2007.4393376

S. Tiedke, K. Prume, T. Schmitz-Kempen

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引用次数: 0

摘要

采用不同的测量方法测量了压电薄膜的电学和机电性能，其中包括一种利用四点弯曲装置在精确定义的均匀机械应变下测量同一样品上的有效纵向和横向压电系数的新方法。通过有限元模拟验证了膜内的应力和相应的应变分布。

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Electrical and electromechanical characterization of piezoelectric thin films in view of MEMS application

The electrical and electromechanical properties of piezoelectric thin films were measured using different measurement procedures including a new method which combines the measurement of both the effective longitudinal and transverse piezoelectric coefficients on the same sample under precisely defined homogeneous mechanical strain utilizing a 4-point bending setup. Stress and corresponding strain distributions in the film were verified by finite element simulations.

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2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics

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