Physical Modeling of Self-RoIled-up Nanomembrane RF Inductors with High Precision

Compared with the first simplified design theory of the SiNx self-rolled-up membrane(S-RuM) radio frequency(RF) inductors, a more precise physical modeling is proposed and demonstrated in this paper. To eliminate the deviation between modeling and measurement data due to assumptions made in the original model, practical working mechanism including skin effect and nonuniform magnetic field distribution inside the tube are considered. The precision of the improved model is validated based on the fabrication of several S-RuM RF inductor samples with a wide range of dimensional parameters. By comparison, measurement data shows that at most 20% increment of precision has been achieved based on the proposed modeling.