W[111]尖端的原子锐场发射器和氧引起的热饰面

R. Bryl, A. Szczepkowicz
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摘要

本文演示并总结了O/W系统中面形的温度和氧暴露限制[111],包括在氧暴露下的面形演变,导致0.3 L-3 L(在1700 K的高温退火温度下为31 L)的中间O2暴露导致全局或阶梯状的面形尖端。本文给出的结果是使用FIM技术获得的。结果表明,在低于800 K、高于1850 K或低于0.5 L的Oa温度下退火后,W[111]针尖未观察到氧引起的饰面现象。暴露0.5 ~ 1.9 L,退火温度800 ~ 1600 K时,{112}刻面发育良好,边缘锋利,整体多面尖端形貌主要在发射体暴露于1 ~ 1.9 L的氧气中,并在1400 ~ 1600 K退火后形成。当曝光量高于2.0 L时,{112}刻面边缘变宽并消失,这归因于三维钨氧化物的形成。在1700k下退火可以很容易地去除氧化物,从而形成锋利的小面边缘。在此基础上,提出了一种制备原子锐场发射极的方法
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Atomically Sharp Field Emitters and Oxygen Caused Thermal Faceting of W[111] Tip
This paper demonstrates and summarises both temperature and oxygen exposure limitations of faceting in the system O/W[111], including facets evolution with-oxygen exposure leading to globally or steplike faceted tip, for intermediate O2 exposures 0.3 L-3 L (31 L at elevated annealing temperature 1700 K). The results presented here were obtained using FIM technique. Results show that after annealing at temperatures lower than 800 K, higher than 1850 K or for Oa exposures lower than 0.5 L the oxygen caused faceting of W[111] tip was not observed. For exposures 0.5-1.9 L and annealing temperatures 800-1600 K well developed {112} facets with sharp edges formed, and the globally faceted tip topography formed mainly after exposing the emitter to 1-1.9 L of oxygen and annealing it at temperatures 1400-1600 K. For exposures higher than 2.0 L edges of the {112} facets were broadening and disappearing, what has been attributed to the formation of 3-dimensional tungsten oxides. The oxides could be easily removed by annealing the tip at 1700 K, what lead to the formation of sharp facet edges. On the basis of these results a method of atomically sharp field emitter preparation is proposed
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