单片熔融硅圆柱谐振器中质量因子变化的测量

Y. Pan, D. Wang, T. Qu, S. Wu, J. Liu, H. Zhao, X. Liu, K. Yang, H. Luo
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引用次数: 0

摘要

圆柱谐振器常用于科氏振动陀螺仪,它通过固体波的进动来测量角速度。质量因子及其均匀性是表征谐振器特性的重要指标。在本文中,我们报告了Q因子在谐振器的对称轴周围有规律地变化。采用非接触式方法,采用声源激励和激光多普勒测振仪(LDV)检测,通过幅频响应(AFR)测量谐振腔Q因子。通过对实验结果的分析,我们认为在天线座测量Q因子是一种方便且相对准确的Q因子研究方法。但需要注意的是,测量点应靠近振动的正极,否则测量结果可能包含巨大的误差。然后建立了基于二自由度质量-弹簧系统的理论模型,分析了Q的变化行为。实验结果与理论计算一致。通过实验结果与数值计算结果的比较,我们发现圆周上的Q变化是频率失配、Q因子失配以及激励方向与主频率轴(Qk)和主阻尼轴(Qc)夹角的复杂综合作用。我们认为可以将LDV的扫描测量与所提出的模型相结合,在不耗费人力的情况下确定Q错配和阻尼轴的方向,因此所提出的方法可以用于高性能圆柱形谐振器陀螺仪的谐振器预筛选。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Quality factor variation measured in a monolithic fused silica cylindrical resonator
Cylindrical resonators are commonly used in Coriolis vibratory gyroscopes, which measure angular velocity through the precession of solid wave. Quality factor and its homogeneity are critical indicators of the resonator characteristics. In this paper, we report that the Q factor varies regularly around the resonator's axis of symmetry. We measured the resonator Q factor by the amplitude frequency response (AFR) using a non-contact method with an acoustic source for excitation and a laser Doppler vibrometer (LDV) for detection. By analyzing experimental results, we concluded that measuring Q factor at antinode can be a convenient and relatively accurate method for Q factor studies. However, one needs to be careful that the measurement point should be near the vibration antinode, otherwise the results may contain huge errors. We then built a theoretical model based on the two degree-of-freedom mass-spring system to analyze the Q variation behavior. The experimental results were consistent with the theoretical calculation. By comparing experimental results with numerical calculations, we showed that the circumferentially Q variation is due to the complex combined effect of frequency mismatch, Q factor mismatch, and the angle between excitation direction and the principle frequency axes (Qk) and the principle damping axes (Qc). We believed it is possible to combine the scan measurement of LDV with proposed model to determine the Q mismatch and direction of the damping axes without labor-consuming procedures, and therefore the proposed method can be developed for pre-screening of resonators for high-performance cylindrical resonator gyroscopes.
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