Miniaturized low-power electro-optic modulator based on silicon integrated nanophotonics and organic polymers

We design and demonstrate a compact, low-power, low-dispersion and broadband optical modulator based on electro-optic (EO) polymer refilled silicon slot photonic crystal waveguide (PCW). The EO polymer is engineered for large EO activity and near-infrared transparency. The half-wave switching-voltage is measured to be Vπ=0.97±0.02V over optical spectrum range of 8nm, corresponding to a record-high effective in-device r33 of 1190pm/V and Vπ×L of 0.291±0.006V×mm in a push-pull configuration. Excluding the slow-light effect, we estimate the EO polymer is poled with an ultra-high efficiency of 89pm/V in the slot. In addition, to achieve high-speed modulation, silicon PCW is selectively doped to reduce RC time delay. The 3-dB RF bandwidth of the modulator is measured to be 11GHz, and a modulation response up to 40GHz is observed.