F. Casset, M. Cueff, E. Defay, G. Le Rhun, A. Suhm, P. Ancey, A. Devos
{"title":"压电膜致动器设计","authors":"F. Casset, M. Cueff, E. Defay, G. Le Rhun, A. Suhm, P. Ancey, A. Devos","doi":"10.1109/ESIME.2011.5765797","DOIUrl":null,"url":null,"abstract":"This paper presents the study of piezoelectric actuators. After the description of simulated actuators and simulation conditions, results will be discussed to define the best actuator design in terms of membrane displacement and compactness. The actuator behaviour under temperature variation is also checked.","PeriodicalId":115489,"journal":{"name":"2011 12th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2011-04-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":"{\"title\":\"Piezoelectric membrane actuator design\",\"authors\":\"F. Casset, M. Cueff, E. Defay, G. Le Rhun, A. Suhm, P. Ancey, A. Devos\",\"doi\":\"10.1109/ESIME.2011.5765797\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents the study of piezoelectric actuators. After the description of simulated actuators and simulation conditions, results will be discussed to define the best actuator design in terms of membrane displacement and compactness. The actuator behaviour under temperature variation is also checked.\",\"PeriodicalId\":115489,\"journal\":{\"name\":\"2011 12th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2011-04-18\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2011 12th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ESIME.2011.5765797\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2011 12th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ESIME.2011.5765797","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
This paper presents the study of piezoelectric actuators. After the description of simulated actuators and simulation conditions, results will be discussed to define the best actuator design in terms of membrane displacement and compactness. The actuator behaviour under temperature variation is also checked.