高迁移率导电氧化物驱动的无热可调谐硅微环谐振器

2021 IEEE 17th International Conference on Group IV Photonics (GFP) Pub Date : 2021-12-01 DOI:10.1109/GFP51802.2021.9673825

W. Hsu, Alan X. Wang

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引用次数: 0

摘要

我们展示了一种无热可调硅微环谐振器，该谐振器使用高迁移率掺钛氧化铟门控的MOS电容器。130 pm/V的高电光调谐效率补偿了高达12 K的温度波动，功耗低至11 pW/nm。

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Thermal-Free Tunable Silicon Microring Resonator Driven by High-Mobility Conducting Oxide

We demonstrated a thermal-free tunable silicon microring resonator using a MOS capacitor gated by high mobility titanium-doped indium oxide. A high electro-optic tuning efficiency of 130 pm/V compensates for temperature fluctuation up to 12 K with a low power consumption of 11 pW/nm.

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2021 IEEE 17th International Conference on Group IV Photonics (GFP)

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