Direct 3D-printing of microlens on single mode polarization-stable VCSEL chip for miniaturized optical spectroscopy

Abstract. In this work, two-photon polymerization three-dimensional laser writing is used to integrate a microlens on the surface of a single mode polarization-stable vertical-cavity surface-emitting laser (VCSEL) to be used as a current-driven tunable source in a compact optical guided-wave gas sensor. The writing conditions are optimized to enable on-demand room temperature and single-step fabrication at a post-mounting stage. We show that a writing time of 5 min is sufficient to fabricate a microlens that efficiently reduces the VCSEL beam divergence, without significant change on its emitted power or polarization stability. The lens addition reduces the spectral available range at high injection currents. A two-dimensional optical modeling of the gain characteristics is used to explain this effect and a new transverse design is proposed to avoid this issue.