L. Aaltonen, P. Rahikkala, M. Saukoski, K. Halonen
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High resolution analog interface for micromachined capacitive accelerometer
A continuous time analog accelerometer interface is feasible when high dynamic range together with wide signal band is required. This paper provides design data for a 120 dB accelerometer with signal band of 300 Hz. Circuit structures for an integrated interface will be presented and important sources of instabilities discussed. Measured and simulated results will be provided to support the theory.