工厂集成

Supika Mashiro, J. Moyne
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引用次数: 2

摘要

IRDS的工厂集成(FI)章节致力于确保微电子制造基础设施包含必要的组件,以可承受的成本和高产量生产产品。实现摩尔定律的潜力需要充分利用器件特征尺寸减小、新材料、良率提高到接近100%、晶圆尺寸增加以及其他制造生产率的提高。这反过来又需要一个工厂系统,可以完全集成额外的工厂组件,并利用这些组件共同交付符合其他IRDS国际焦点小组(ift)确定的规格以及成本,数量和产量目标的产品。保持每个功能成本每年降低30%的趋势也需要抓住所有可能的成本降低机会。这些机会包括前端和后端生产、设施、产量管理和改进、增加系统集成(如上下供应链)以及改善环境健康和安全。FI挑战在实现这些机遇方面发挥着关键作用,许多FI技术挑战正在成为实现重大技术里程碑的限制因素。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Factory Integration
The Factory Integration (FI) chapter of the IRDS is dedicated to ensuring that the microelectronics manufacturing infrastructure contains the necessary components to produce items at affordable cost and high volume. Realizing the potential of Moore's Law requires taking full advantage of device feature size reductions, new materials, yield improvement to near 100%, wafer size increases, and other manufacturing productivity improvements. This in turn requires a factory system that can fully integrate additional factory components and utilize these components collectively to deliver items that meet specifications determined by other IRDS international focus teams (IFTs) as well as cost, volume and yield targets. Preserving the decades-long trend of 30% per year reduction in cost per function also requires capturing all possible cost reduction opportunities. These include opportunities in front-end as well as back-end production, facilities, yield management and improvement, increased system integration such as up and down the supply chain, and improving environmental health and safety. FI challenges play a key role realizing these opportunities and many FI technology challenges are becoming limiters to achieving major technology milestones.
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