三维环带结构近场增强的定位

2022 14th International Conference on Advanced Semiconductor Devices and Microsystems (ASDAM) Pub Date : 2022-10-23 DOI:10.1109/ASDAM55965.2022.9966787

P. Micek, P. Gašo, D. Pudiš

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引用次数: 0

摘要

本文研究了由一系列高架环形带板组成的IP-Dip光刻胶近场探针的仿真设计和近场光学显微镜测量。环形带片的高度增加有效地抑制了衍射现象，导致沿光轴的倏逝和传播模式的窄发射。

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Localization of the near-field enhancement by 3D ring-zone structure

This work deals with a simulation-based design and near-field optical microscopy measurement of IP-Dip photoresist near-field probe consisting of a series of elevated ring zone plates. The height increment implemented into the ring zone plates effectively suppresses the diffraction phenomena resulting in a narrow emission of the evanescent and propagating modes along the optical axis.

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2022 14th International Conference on Advanced Semiconductor Devices and Microsystems (ASDAM)

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