用于光网络应用的微机电扫描装置

2002 IEEE International Solid-State Circuits Conference. Digest of Technical Papers (Cat. No.02CH37315) Pub Date : 2002-08-07 DOI:10.1109/ISSCC.2002.993080

M. Wu, D. Hah, P. Patterson, H. Toshiyoshi

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引用次数: 3

摘要

综述了用于光网络应用的光学MEMS器件的研究进展，介绍了一种带角垂直梳状(AVC)驱动器的扫描微镜。AVC扫描仪采用单一蚀刻工艺，完全自对准。它的扫描角度比传统的垂直梳子设备大50%。共振频率为630赫兹。

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Microelectromechanical scanning devices for optical networking applications

The state-of-the-art of optical MEMS devices for optical networking applications is reviewed, and a scanning micromirror with angular vertical comb (AVC) actuators is introduced. The AVC scanner uses a single etching process and is completely self-aligned. It has 50% larger scan angle than conventional vertical comb devices. Resonant frequency is 630 Hz.

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2002 IEEE International Solid-State Circuits Conference. Digest of Technical Papers (Cat. No.02CH37315)

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