F. Hollerweger, A. Springer, R. Weigell, W. Ruile, R. Thomas, S. Berek, M. Guglielmi
{"title":"基于声表面波量产技术的3.15 GHz声表面波梯形滤波器的设计与性能","authors":"F. Hollerweger, A. Springer, R. Weigell, W. Ruile, R. Thomas, S. Berek, M. Guglielmi","doi":"10.1109/MWSYM.1999.780220","DOIUrl":null,"url":null,"abstract":"To meet the increasing demand of high performance filters in GHz radio communication systems, we have improved the design techniques and fabrication processes for SAW devices. The standard optical projection printing technique based on i-line lithography used for mass-production was optimized, thus attaining a linewidth of 0.3 microns. As a first SAW device prototype we designed and fabricated a ladder type bandpass filter from 42/spl deg/ rotYX-LiTaO/sub 3/ substrate, at 3.15 GHz having a bandwidth of close to 200 MHz and a minimum insertion loss of 1.7 dB.","PeriodicalId":339267,"journal":{"name":"1999 IEEE MTT-S International Microwave Symposium Digest (Cat. No.99CH36282)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-06-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"9","resultStr":"{\"title\":\"Design and performance of a SAW ladder-type filter at 3.15 GHz using SAW mass production technology\",\"authors\":\"F. Hollerweger, A. Springer, R. Weigell, W. Ruile, R. Thomas, S. Berek, M. Guglielmi\",\"doi\":\"10.1109/MWSYM.1999.780220\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"To meet the increasing demand of high performance filters in GHz radio communication systems, we have improved the design techniques and fabrication processes for SAW devices. The standard optical projection printing technique based on i-line lithography used for mass-production was optimized, thus attaining a linewidth of 0.3 microns. As a first SAW device prototype we designed and fabricated a ladder type bandpass filter from 42/spl deg/ rotYX-LiTaO/sub 3/ substrate, at 3.15 GHz having a bandwidth of close to 200 MHz and a minimum insertion loss of 1.7 dB.\",\"PeriodicalId\":339267,\"journal\":{\"name\":\"1999 IEEE MTT-S International Microwave Symposium Digest (Cat. No.99CH36282)\",\"volume\":\"15 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1999-06-13\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"9\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"1999 IEEE MTT-S International Microwave Symposium Digest (Cat. No.99CH36282)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MWSYM.1999.780220\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"1999 IEEE MTT-S International Microwave Symposium Digest (Cat. No.99CH36282)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MWSYM.1999.780220","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Design and performance of a SAW ladder-type filter at 3.15 GHz using SAW mass production technology
To meet the increasing demand of high performance filters in GHz radio communication systems, we have improved the design techniques and fabrication processes for SAW devices. The standard optical projection printing technique based on i-line lithography used for mass-production was optimized, thus attaining a linewidth of 0.3 microns. As a first SAW device prototype we designed and fabricated a ladder type bandpass filter from 42/spl deg/ rotYX-LiTaO/sub 3/ substrate, at 3.15 GHz having a bandwidth of close to 200 MHz and a minimum insertion loss of 1.7 dB.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
