利用荧光共聚焦显微镜对玻璃亚表面损伤进行无损估计

Warren E. Smith, T. Bui, A. Lindquist, S. Jacobs
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引用次数: 1

摘要

切割、研磨和抛光光学材料的过程会导致在表面以下延伸一定深度的裂缝。未解除的应变和存在于表面以下的深裂纹会严重影响光学系统的性能,特别是在需要精密光学的应用中。在高功率激光中,亚表面损伤(SSD)会降低图像对比度,导致图形不稳定,并导致灾难性断裂[1]。不同的光学材料表现出不同形式的物理损伤。用于提高生产率的技术,如高进料速率和高lap压力,是SSD的最严重原因[2]。一种简便、无损的固态硬盘测量方法对光学制造技术的改进具有重要意义。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Non-Destructive Estimation of Subsurface Glass Damage Using Fluorescent Confocal Microscopy
The processes of cutting, grinding and polishing optical materials cause fractures that extend some depth below the surface. The unrelieved strain and deep cracks present below the surface can seriously affect the performance of an optical system, especially in applications requiring precision optics. Subsurface damage (SSD) can lower image contrast, cause figure instability, and contribute to catastrophic fracture in high-power lasers [1]. Different optical materials present different forms of physical damage. Techniques used to increase productivity, such as high feed rates and high lap pressures, are the most serious causes of SSD [2]. An easily employed and non-destructive SSD measurement is important for the improvement of optical fabrication techniques.
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