微波等离子体辅助磁控溅射红外多层薄膜带通滤波器在非色散红外气体传感器中的应用

Optical Interference Coatings Conference (OIC) 2022 Pub Date : 1900-01-01 DOI:10.1364/oic.2022.thc.7

Jonathan Pomfret, D. Gibson, L. Fleming, Shigeng Song, Greg Mcgann, Sam Ahmadzadeh, P. MacKay

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引用次数: 0

摘要

介绍了微波等离子体辅助脉冲直流磁控溅射制备红外带通滤波器的方法。演示了适用于NDIR气体传感器的各种环境条件下的热光学和光谱特性。

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Microwave Plasma Assisted Magnetron Sputtering of Infrared Multilayer Thin Film Bandpass Filters for application in non-dispersive infrared gas sensors

Infrared bandpass filters deposited using microwave plasma assisted pulsed DC magnetron sputtering are described. Thermo-optical and spectral properties across a range of environmental conditions suitable for use in NDIR gas sensors are demonstrated.

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Optical Interference Coatings Conference (OIC) 2022

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