inp和gaas基激光二极管光学涂层的离子束溅射

M. Falmbigl, Sandeep Kohli, Riju Singhal, J. George
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引用次数: 0

摘要

本文报道了激光二极管用离子束沉积光学涂层的性能。我们的研究结果证明了精确控制沉积条件,以定制抗反射和高反射涂层的薄膜性能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Ion Beam Sputtering of Optical Coatings for InP-and GaAs-based Laser Diodes
We report on the performance of ion beam deposited optical coatings for laser diodes. Our results demonstrate a precise control of deposition conditions to tailor thin film properties for anti-reflective and high-reflective coatings.
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