可在商用mmic上后处理的射频微机械开关

2001 Proceedings. 51st Electronic Components and Technology Conference (Cat. No.01CH37220) Pub Date : 2001-05-29 DOI:10.1109/ECTC.2001.927743

L. R. Sloan, C. Sullivan, C. Tigges, C. Sandoval, D. Palmer, S. Hietala, T. Christenson, C. Dyck, T. A. Plut, G. R. Schuster

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引用次数: 1

摘要

讨论了射频微机电开关的应用需求和规格。介绍了一种共面波导MEMs开关的设计、低温加工和射频特性。这种开关可以集成到以前制造的mmic或晶体管芯片上。这些开关在“开”状态(关闭)时显示0.2 dB损耗，需要大约10伏才能运行，并且可以承载超过200 mW的RF。

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RF micromechanical switches that can be post processed on commercial MMICs

The application need for and specification of RF micro-electro-mechanical (MEM) switches are discussed. The design, low temperature processing, and RF characteristics of a coplanar waveguide MEMs switch are presented. This switch can be integrated onto previously fabricated MMICs or transistor chips. These switches demonstrate 0.2 dB loss while in the "on" state (closed), need approximately 10 volts to operate, and can carry more than 200 mW RF.

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2001 Proceedings. 51st Electronic Components and Technology Conference (Cat. No.01CH37220)

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