用于星载测量的简易激光微干涉仪

G. Popov, E. Popov
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摘要

激光干涉仪由激光器、点状反射镜、形成无像差光束(参比光束)和被测反射镜系统反射的分析光束组成。分析光束被引导到显示器或CCD上,并与参考光束重新组合形成一个特怀曼-格林条纹系统。微干涉仪体积小、结构简单、重量轻,因此特别推荐用于太空望远镜的光学测试和极紫外光刻测试
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Simple Laser Microinterferometer for Spaceborne Measurements
Laser interferometer consists of laser, point-like mirror, forming aberration-free beam of light (reference beam), and analyzer beam reflecting by a mirror system to be tested. The analyzer beam is directed to viewing screen or CCD, and it is recombined with the reference beam to produce a system of Twyman-Green fringes. Microinterferometer is very small, simple and lightweight, that is why it is especially recommended for testing optics of the space telescopes in the space, and extreme UV lithography
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