M. Schnarrenberger, L. Zimmermann, T. Mitze, K. Voigt, J. Bruns, K. Petermann
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Concept for an Alternative Solder-Free Flip-Chip Technique on SOI using Black-Silicon
Black-silicon regions are defined on an SOI board and covered with an adhesion layer. The contacts of to be mounted devices are pushed towards these regions, to establish a mechanical, electrical, and thermal contact