{"title":"飞秒激光微加工金刚石微沟槽的形成","authors":"Ryoji Maruyama, T. Tamaki, W. Watanabe","doi":"10.1117/12.2542281","DOIUrl":null,"url":null,"abstract":"Laser processing of diamond have attracted attention. Ultrashort laser pulses can be used for micro-structuring on diamond and in bulk diamond. In this paper, we report on laser parameters for surface structuring of diamond by using femtosecond laser pluses at a repetition rate of 1 kHz. By changing scanning speed and energy, different types of grooves were inscribed. The morphology and depth of grooves were investigated.","PeriodicalId":131350,"journal":{"name":"Micro + Nano Materials, Devices, and Applications","volume":"47 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-12-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Formation of micro-groove on diamond by femtosecond laser micromachining\",\"authors\":\"Ryoji Maruyama, T. Tamaki, W. Watanabe\",\"doi\":\"10.1117/12.2542281\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Laser processing of diamond have attracted attention. Ultrashort laser pulses can be used for micro-structuring on diamond and in bulk diamond. In this paper, we report on laser parameters for surface structuring of diamond by using femtosecond laser pluses at a repetition rate of 1 kHz. By changing scanning speed and energy, different types of grooves were inscribed. The morphology and depth of grooves were investigated.\",\"PeriodicalId\":131350,\"journal\":{\"name\":\"Micro + Nano Materials, Devices, and Applications\",\"volume\":\"47 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-12-31\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Micro + Nano Materials, Devices, and Applications\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2542281\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Micro + Nano Materials, Devices, and Applications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2542281","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Formation of micro-groove on diamond by femtosecond laser micromachining
Laser processing of diamond have attracted attention. Ultrashort laser pulses can be used for micro-structuring on diamond and in bulk diamond. In this paper, we report on laser parameters for surface structuring of diamond by using femtosecond laser pluses at a repetition rate of 1 kHz. By changing scanning speed and energy, different types of grooves were inscribed. The morphology and depth of grooves were investigated.
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