硅光子学的基本模块综述:从制造的角度

Jubayer Shawon Shawon, Feng Li
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引用次数: 1

摘要

硅光子学是一种颠覆性的半导体技术,它利用了光的非凡特性,同时充分利用了半导体工业中已经成熟的CMOS工艺。然而,就像20世纪70年代的电子工业一样,硅光子学目前还处于起步阶段。硅光子学的基本组成部分,如波导、激光器、调制器等,还没有完全优化,以实现低成本的大规模生产。在本文中,将介绍与开发和优化上述关键组件相关的最新技术。我们也将讨论矽光子学的制程整合所面临的挑战。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A Review of the Building Blocks of Silicon Photonics: From Fabrication Perspective
Silicon photonics is a disruptive semiconductor technology that taps into the extraordinary properties of light while taking full advantage of the already matured CMOS processes developed in the semiconductor industry. However, just like electronic industry in the 1970s, currently, Silicon Photonics is in its infancy. The fundamental building blocks of silicon photonics such as waveguides, lasers, modulators, etc. are yet to be fully optimized for low-cost-mass-manufacturing. In this paper, the current state-of-the-art related to developing and optimizing these aforementioned key components will be presented. The challenges of process integration regarding Silicon photonics will also be discussed.
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