在特斯拉SEZAM生产像素探测器

The Fourth International Conference on Advanced Semiconductor Devices and Microsystem Pub Date : 2002-12-16 DOI:10.1109/ASDAM.2002.1088543

M. Frys, S. Kapsia, Z. Spetik, T. Sezam, R.P. Radhostem, V. Jurka, V. Vrba

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摘要

特斯拉SEZAM是欧洲核子研究中心ATLAS实验的像素探测器生产商之一。本文介绍了传感器的具体设计特点和传感器结构制造的基本加工步骤。介绍了所生产传感器的电学特性。

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Manufacturing of pixel detectors at Tesla SEZAM

Tesla SEZAM is one of the producers of pixel detectors for the ATLAS experiment at CERN. In the present paper specific design features of sensors and basic processing steps for the manufacturing of sensor structures are described. Electrical characteristics illustrating the quality of produced sensors are presented.

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The Fourth International Conference on Advanced Semiconductor Devices and Microsystem

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