过程中表面粗糙度测量装置，用于信息化抛光过程的实时调整和优化

Precision Optics Manufacturing Pub Date : 2021-06-07 DOI:10.1117/12.2596034

D. Moszko, O. Faehnle, C. Vogt, D. Kim

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引用次数: 0

摘要

在本文中，我们提出了一种可行的变型装置，用于光学抛光过程中的过程粗糙度测量。该系统，已经分别提出了tim i - tim，已经在技术上变化，现在可以集成到几乎任何杠杆抛光过程中，只需很少的努力。这为实时光学制造过程监控和优化提供了新的可能性。

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In-process surface roughness measuring device for information-based real-time polishing process adjustment and optimization

In this paper we present a feasible variant of a device for in-process roughness measurement during an optical polishing process. The system, already presented as Tirm respectively I-Tirm, has been technically varied and can now be integrated into almost any lever polishing process with little effort. This enables new possibilities regarding real-time optical manufacturing process monitoring and optimization.

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Precision Optics Manufacturing

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