高速率沉积与凹进式射频电极

{"title":"高速率沉积与凹进式射频电极","authors":"M. Koyama, M. Sadamoto, Y. Ashida, N. Fukuda, A. Nitta","doi":"10.1016/B978-0-08-037193-1.50045-8","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":307618,"journal":{"name":"Clean and Safe Energy Forever","volume":"52 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"HIGH RATE DEPOSITION WITH THE RECESSED TYPE R. F. ELECTRODE\",\"authors\":\"M. Koyama, M. Sadamoto, Y. Ashida, N. Fukuda, A. Nitta\",\"doi\":\"10.1016/B978-0-08-037193-1.50045-8\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":307618,\"journal\":{\"name\":\"Clean and Safe Energy Forever\",\"volume\":\"52 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Clean and Safe Energy Forever\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1016/B978-0-08-037193-1.50045-8\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Clean and Safe Energy Forever","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1016/B978-0-08-037193-1.50045-8","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}