块状氮化镓及其作为衬底在某些电子和光电子器件中构建量子纳米结构的应用

M. Boćkowski
{"title":"块状氮化镓及其作为衬底在某些电子和光电子器件中构建量子纳米结构的应用","authors":"M. Boćkowski","doi":"10.1117/12.2059749","DOIUrl":null,"url":null,"abstract":"The use of GaN crystals grown by three methods (and their combinations): Hydride Vapor Phase Epitaxy (HVPE), high nitrogen pressure solution (HNPS) and ammonothermal method for optoelectronic (laser diodes) and electronic (transistors) devices is presented. After a brief review on the development of the three crystallization methods, the GaN crystals’ uniform and unique properties, which allow to use them as substrates for building devices, are shown. The Metal Organic Vapor Phase Epitaxy (MOCVD) and Molecular Beam Epitaxy (MBE) technologies for growing the nitride quantum nanostructures as well as the structures’ properties and processing of devices are demonstrated. Future challenges and perspectives for application of bulk GaN as substrates in building quantum nanostructures for some electronic and optoelectronic devices are discussed.","PeriodicalId":128143,"journal":{"name":"Optics & Photonics - NanoScience + Engineering","volume":"38 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-09-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Bulk GaN and its application as substrates in building quantum nanostructures for some electronic and optoelectronic devices\",\"authors\":\"M. Boćkowski\",\"doi\":\"10.1117/12.2059749\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The use of GaN crystals grown by three methods (and their combinations): Hydride Vapor Phase Epitaxy (HVPE), high nitrogen pressure solution (HNPS) and ammonothermal method for optoelectronic (laser diodes) and electronic (transistors) devices is presented. After a brief review on the development of the three crystallization methods, the GaN crystals’ uniform and unique properties, which allow to use them as substrates for building devices, are shown. The Metal Organic Vapor Phase Epitaxy (MOCVD) and Molecular Beam Epitaxy (MBE) technologies for growing the nitride quantum nanostructures as well as the structures’ properties and processing of devices are demonstrated. Future challenges and perspectives for application of bulk GaN as substrates in building quantum nanostructures for some electronic and optoelectronic devices are discussed.\",\"PeriodicalId\":128143,\"journal\":{\"name\":\"Optics & Photonics - NanoScience + Engineering\",\"volume\":\"38 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2014-09-16\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optics & Photonics - NanoScience + Engineering\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2059749\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optics & Photonics - NanoScience + Engineering","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2059749","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1

摘要

介绍了氢化物气相外延法(HVPE)、高氮压法(HNPS)和氨热法三种方法(及其组合)生长GaN晶体在光电(激光二极管)和电子(晶体管)器件中的应用。在简要回顾了三种结晶方法的发展之后,显示了氮化镓晶体的均匀和独特的性质,这使得它们可以用作构建器件的基板。介绍了金属有机气相外延(MOCVD)和分子束外延(MBE)技术生长氮化物量子纳米结构、结构特性和器件工艺。讨论了块状氮化镓作为衬底在某些电子和光电子器件中构建量子纳米结构的未来挑战和前景。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Bulk GaN and its application as substrates in building quantum nanostructures for some electronic and optoelectronic devices
The use of GaN crystals grown by three methods (and their combinations): Hydride Vapor Phase Epitaxy (HVPE), high nitrogen pressure solution (HNPS) and ammonothermal method for optoelectronic (laser diodes) and electronic (transistors) devices is presented. After a brief review on the development of the three crystallization methods, the GaN crystals’ uniform and unique properties, which allow to use them as substrates for building devices, are shown. The Metal Organic Vapor Phase Epitaxy (MOCVD) and Molecular Beam Epitaxy (MBE) technologies for growing the nitride quantum nanostructures as well as the structures’ properties and processing of devices are demonstrated. Future challenges and perspectives for application of bulk GaN as substrates in building quantum nanostructures for some electronic and optoelectronic devices are discussed.
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