{"title":"溅射沉积与电子束沉积相结合沉积低折射率SiO2光学薄膜的光散射特性","authors":"Taisei Wakamiya, H. Murotani, Takayuki Matsudaira","doi":"10.1364/oic.2022.tha.10","DOIUrl":null,"url":null,"abstract":"This report discusses a method for evaluating the light-scattering properties by pores in low refractive index SiO2 optical thin films that were deposited by a combination coating method of sputter deposition and electron beam deposition.","PeriodicalId":301400,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2022","volume":"26 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Light-Scattering Properties of Low Refractive Index SiO2 Optical Thin Films Deposited by a Combination Coating Method of Sputter Deposition and Electron Beam Deposition\",\"authors\":\"Taisei Wakamiya, H. Murotani, Takayuki Matsudaira\",\"doi\":\"10.1364/oic.2022.tha.10\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This report discusses a method for evaluating the light-scattering properties by pores in low refractive index SiO2 optical thin films that were deposited by a combination coating method of sputter deposition and electron beam deposition.\",\"PeriodicalId\":301400,\"journal\":{\"name\":\"Optical Interference Coatings Conference (OIC) 2022\",\"volume\":\"26 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optical Interference Coatings Conference (OIC) 2022\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/oic.2022.tha.10\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Interference Coatings Conference (OIC) 2022","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/oic.2022.tha.10","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Light-Scattering Properties of Low Refractive Index SiO2 Optical Thin Films Deposited by a Combination Coating Method of Sputter Deposition and Electron Beam Deposition
This report discusses a method for evaluating the light-scattering properties by pores in low refractive index SiO2 optical thin films that were deposited by a combination coating method of sputter deposition and electron beam deposition.
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