激光脉冲结晶和退火制备YBa/sub 2/Cu/sub 3/O/sub 7-x//MgO和YBa/sub 2/Cu/sub 3/O/sub 7-x//Si薄膜结构

The Fourth International Conference on Advanced Semiconductor Devices and Microsystem Pub Date : 2002-12-16 DOI:10.1109/ASDAM.2002.1088470

B.K. Kotlyarchuk, V. Savchuk

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摘要

本文介绍了YBa/sub 2/Cu/sub 3/O/sub 7-x/高温超导非晶层激光脉冲结晶和退火的理论和实验研究结果。结果表明，对于给定的薄膜厚度和衬底类型，存在一个最佳的氧压力、激光脉冲能量密度、持续时间和波长，在此条件下，薄膜化合物的热力学稳定性得以保持。

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Formation of YBa/sub 2/Cu/sub 3/O/sub 7-x//MgO and YBa/sub 2/Cu/sub 3/O/sub 7-x//Si thin film structure by laser pulse crystallisation and annealing

The results of the theoretical and experimental study of laser pulse crystallisation and annealing of the YBa/sub 2/Cu/sub 3/O/sub 7-x/ high-temperature superconducting amorphous layers are presented in the paper. It is determined that for each given film thickness and type of substrate there exists a optimal pressure of oxygen, laser pulse energy density, its duration and wavelength at which the conditions Of thermodynamic stability of the film compound is preserved.

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The Fourth International Conference on Advanced Semiconductor Devices and Microsystem

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