大型圆形衍射光学元件的制造

J. Burge
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引用次数: 7

摘要

亚利桑那大学开发了用于制造大型计算机生成全息图(CGH’s)的设备和技术,用于测量非球面望远镜反射镜。建造了一台大型激光书写机,用于在直径达1.8米的球面上制作二元带板,焦比快至f/1。这台机器写6µm到150µm的特征,径向位置精度优于全直径上的1µm rms。通过使用简单的热化学技术来书写图案,避免了应用和加工光刻胶的问题。许多直径达1.2米的全息图已经被成功地写入和测试。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Fabrication of large circular diffractive optics
Equipment and techniques were developed at the University of Arizona for fabricating large computer-generated holograms (CGH’s) for measuring aspheric telescope mirrors. A large laser writing machine was built to fabricate binary zone plates onto spherical surfaces up to 1.8 meters in diameter and with focal ratios as fast as f/1. This machine writes 6-µm to 150-µm features with radial position accuracy better than 1 µm rms over the full diameter. The problems of applying and processing photoresist are avoided by writing the patterns using a simple thermochemical technique. Numerous holograms up to 1.2 m across have been successfully written and tested.
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