湿化学蚀刻辅助飞秒激光诱导全硅介电超表面

{"title":"湿化学蚀刻辅助飞秒激光诱导全硅介电超表面","authors":"E. Stratakis, I. Sakellari, S. Droulias, A. Lemonis","doi":"10.34133/ultrafastscience.0019","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":268204,"journal":{"name":"Ultrafast Science","volume":"103 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-01-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Femtosecond laser induced all-silicon dielectric metasurfaces assisted by wet chemical etching\",\"authors\":\"E. Stratakis, I. Sakellari, S. Droulias, A. Lemonis\",\"doi\":\"10.34133/ultrafastscience.0019\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":268204,\"journal\":{\"name\":\"Ultrafast Science\",\"volume\":\"103 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-01-25\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Ultrafast Science\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.34133/ultrafastscience.0019\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Ultrafast Science","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.34133/ultrafastscience.0019","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}