亚单层量子点红外探测器中量子约束各向异性的研究

A. Alzeidan, T. Cantalice, Ailton Garcia, C. Deneke, A. Quivy
{"title":"亚单层量子点红外探测器中量子约束各向异性的研究","authors":"A. Alzeidan, T. Cantalice, Ailton Garcia, C. Deneke, A. Quivy","doi":"10.1109/SBMicro.2019.8919349","DOIUrl":null,"url":null,"abstract":"A submonolayer quantum dot infrared photodetector (SML-QDIP) was grown on a GaAs(001) substrate by molecular beam epitaxy and processed using conventional optical lithography, wet etching and electronbeam metallization. Additionally, a side of the device was polished at 45 degrees in order to allow optical measurements with s- and p-polarized light. The electro-optical properties of the device were investigated both in normal incidence and at 45 degrees in order to study the quantum confinement of the SMLQD along the lateral and vertical directions. The s-to-p photocurrent ratio was found to be between 0.10 and 0.43, showing that, in this new type of quantum dot, the lateral confinement is still weaker than along the vertical direction, but is better than the one of conventional QDs fabricated in the Stranski-Krastanov growth mode. The maximum specific detectivity in normal incidence was $1.3 \\times 10^{11}$ cm Hz1/2/W at 30 K and 0.9V.","PeriodicalId":403446,"journal":{"name":"2019 34th Symposium on Microelectronics Technology and Devices (SBMicro)","volume":"83 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Investigation of the quantum confinement anisotropy in a submonolayer quantum dot infrared photodetector\",\"authors\":\"A. Alzeidan, T. Cantalice, Ailton Garcia, C. Deneke, A. Quivy\",\"doi\":\"10.1109/SBMicro.2019.8919349\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A submonolayer quantum dot infrared photodetector (SML-QDIP) was grown on a GaAs(001) substrate by molecular beam epitaxy and processed using conventional optical lithography, wet etching and electronbeam metallization. Additionally, a side of the device was polished at 45 degrees in order to allow optical measurements with s- and p-polarized light. The electro-optical properties of the device were investigated both in normal incidence and at 45 degrees in order to study the quantum confinement of the SMLQD along the lateral and vertical directions. The s-to-p photocurrent ratio was found to be between 0.10 and 0.43, showing that, in this new type of quantum dot, the lateral confinement is still weaker than along the vertical direction, but is better than the one of conventional QDs fabricated in the Stranski-Krastanov growth mode. The maximum specific detectivity in normal incidence was $1.3 \\\\times 10^{11}$ cm Hz1/2/W at 30 K and 0.9V.\",\"PeriodicalId\":403446,\"journal\":{\"name\":\"2019 34th Symposium on Microelectronics Technology and Devices (SBMicro)\",\"volume\":\"83 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2019 34th Symposium on Microelectronics Technology and Devices (SBMicro)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SBMicro.2019.8919349\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 34th Symposium on Microelectronics Technology and Devices (SBMicro)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SBMicro.2019.8919349","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1

摘要

采用分子束外延技术在GaAs(001)衬底上生长了亚单层量子点红外光电探测器(SML-QDIP),并采用常规光学光刻、湿法蚀刻和电子束金属化工艺对其进行了加工。此外,该装置的一面被抛光成45度,以便使用s和p偏振光进行光学测量。为了研究SMLQD在横向和垂直方向上的量子约束,研究了该器件在正入射和45度入射下的电光特性。s-to-p光电流比在0.10 ~ 0.43之间,表明在这种新型量子点中,横向约束仍然弱于沿垂直方向,但优于传统的stranski - krstanov生长模式下制备的量子点。在30 K, 0.9V下,正常入射下的最大比检出率为1.3 \ × 10^{11}$ cm Hz1/2/W。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Investigation of the quantum confinement anisotropy in a submonolayer quantum dot infrared photodetector
A submonolayer quantum dot infrared photodetector (SML-QDIP) was grown on a GaAs(001) substrate by molecular beam epitaxy and processed using conventional optical lithography, wet etching and electronbeam metallization. Additionally, a side of the device was polished at 45 degrees in order to allow optical measurements with s- and p-polarized light. The electro-optical properties of the device were investigated both in normal incidence and at 45 degrees in order to study the quantum confinement of the SMLQD along the lateral and vertical directions. The s-to-p photocurrent ratio was found to be between 0.10 and 0.43, showing that, in this new type of quantum dot, the lateral confinement is still weaker than along the vertical direction, but is better than the one of conventional QDs fabricated in the Stranski-Krastanov growth mode. The maximum specific detectivity in normal incidence was $1.3 \times 10^{11}$ cm Hz1/2/W at 30 K and 0.9V.
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