高漏偏置非状态应力下AlGaN/GaN hemt的降解过程

M. Florovič, J. Kovác, P. Benko, J. Škriniarová, P. Kordos, D. Donoval
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引用次数: 0

摘要

本文报道了高漏偏置非状态应力下AlGaN/GaN hemt的降解过程。分别在漏极电压60 V和栅极电压-5 V下进行30min的去应力处理。60min。在应力前、应力中和应力后分别评估静态装置的性能。进行的测量显示漏极电流略有下降,阈值电压也有所下降。然而,这些影响在应力后30分钟的测量中部分恢复如下。这些都表明积聚在结构内部和AlGaN层表面的电子在栅极和漏极之间的高电场作用下产生了静电电荷。这会导致通道电流的减少,并在AlGaN/GaN hemt的非状态降解过程中起主要作用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Degradation processes in AlGaN/GaN HEMTs under high drain-bias off-state stress
This paper reports on degradation processes in the AlGaN/GaN HEMTs under high drain-bias off-state stress. The devices were off-stressed at the drain voltage of 60 V and the gate voltage of -5 V for 30 min, resp.60 min. Static device performance was evaluated before, during and after the stress. Performed measurements show a slight degradation in the drain current and a decrease of the threshold voltage. However, these effects are partially recovered as follows from the measurement performed 30 min after the stress. All these indicates that the electrons that accumulate in the structure as well as on the surface of AlGaN layer create an electrostatic charge induced by high electric field between gate and drain. This causes a reduction in the channel current and plays a major role during the off-state degradation of AlGaN/GaN HEMTs.
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