采用压电喷射抗蚀剂的喷射可滚压纳米压印技术

2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013) Pub Date : 2013-08-01 DOI:10.1109/NANO.2013.6720909

David Gehlhausen, S. Menezes, Lichuan Chen, Gyu-ho Kim, Hongbing Lu, Jinming Gao, Walter Hu

{"title":"采用压电喷射抗蚀剂的喷射可滚压纳米压印技术","authors":"David Gehlhausen, S. Menezes, Lichuan Chen, Gyu-ho Kim, Hongbing Lu, Jinming Gao, Walter Hu","doi":"10.1109/NANO.2013.6720909","DOIUrl":null,"url":null,"abstract":"We report an jet rollable nanoimprint lithography tool as a low cost method to produce micro- and nano-structures rapidly over large areas. We integrated a piezoelectric nozzle to deposit resist in-line in a low-waste, high-precision manner. We demonstrate the capabilities of this system by creating a variety of microstructures in SU8 resist with high pattern transfer fidelity.","PeriodicalId":189707,"journal":{"name":"2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013)","volume":"47 31 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Jet rollable nanoimprint lithography with piezoelectric jetting of resist\",\"authors\":\"David Gehlhausen, S. Menezes, Lichuan Chen, Gyu-ho Kim, Hongbing Lu, Jinming Gao, Walter Hu\",\"doi\":\"10.1109/NANO.2013.6720909\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We report an jet rollable nanoimprint lithography tool as a low cost method to produce micro- and nano-structures rapidly over large areas. We integrated a piezoelectric nozzle to deposit resist in-line in a low-waste, high-precision manner. We demonstrate the capabilities of this system by creating a variety of microstructures in SU8 resist with high pattern transfer fidelity.\",\"PeriodicalId\":189707,\"journal\":{\"name\":\"2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013)\",\"volume\":\"47 31 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/NANO.2013.6720909\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NANO.2013.6720909","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

我们报告了一种喷射可卷曲纳米压印工具，作为一种低成本的方法，可以在大面积上快速生产微纳米结构。我们集成了一个压电喷嘴，以低浪费、高精度的方式在线沉积抗蚀剂。我们通过在SU8抗蚀剂中创建具有高模式转移保真度的各种微结构来证明该系统的能力。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Jet rollable nanoimprint lithography with piezoelectric jetting of resist

We report an jet rollable nanoimprint lithography tool as a low cost method to produce micro- and nano-structures rapidly over large areas. We integrated a piezoelectric nozzle to deposit resist in-line in a low-waste, high-precision manner. We demonstrate the capabilities of this system by creating a variety of microstructures in SU8 resist with high pattern transfer fidelity.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013)

自引率

0.00%

发文量