{"title":"Sn纳米粒子阵列β-Ga2O3太阳盲光电探测器的局部表面等离子体增强光探测","authors":"Sishuo Yang, L. Qian","doi":"10.1109/EDTM53872.2022.9797973","DOIUrl":null,"url":null,"abstract":"Surface plasma is effective to enhance the light absorption of semiconductor and accordingly the photodetection performance of related photodetectors, but its application in the region of deep-ultraviolet light still face severe challenges. Herein, a β-Ga2O3 solar-blind photodetector with Sn nanoparticles array is fabricated. Due to the surface plasma effect of Sn nanoparticles with suitable sizes, the photodetection characteristics of β-Ga2O3 solar-blind photodetector, including light to dark current ratio, responsivity and detectivity, have been successfully doubled, resulting in ultrahigh sensitivity. This work provides an alternative technique to realize low-cost, high-performance and solar-blind photodetectors.","PeriodicalId":158478,"journal":{"name":"2022 6th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Localized surface plasmon-enhanced photodetection in β-Ga2O3 solar-blind photodetector with Sn nanoparticles array\",\"authors\":\"Sishuo Yang, L. Qian\",\"doi\":\"10.1109/EDTM53872.2022.9797973\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Surface plasma is effective to enhance the light absorption of semiconductor and accordingly the photodetection performance of related photodetectors, but its application in the region of deep-ultraviolet light still face severe challenges. Herein, a β-Ga2O3 solar-blind photodetector with Sn nanoparticles array is fabricated. Due to the surface plasma effect of Sn nanoparticles with suitable sizes, the photodetection characteristics of β-Ga2O3 solar-blind photodetector, including light to dark current ratio, responsivity and detectivity, have been successfully doubled, resulting in ultrahigh sensitivity. This work provides an alternative technique to realize low-cost, high-performance and solar-blind photodetectors.\",\"PeriodicalId\":158478,\"journal\":{\"name\":\"2022 6th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-03-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2022 6th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/EDTM53872.2022.9797973\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 6th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/EDTM53872.2022.9797973","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Localized surface plasmon-enhanced photodetection in β-Ga2O3 solar-blind photodetector with Sn nanoparticles array
Surface plasma is effective to enhance the light absorption of semiconductor and accordingly the photodetection performance of related photodetectors, but its application in the region of deep-ultraviolet light still face severe challenges. Herein, a β-Ga2O3 solar-blind photodetector with Sn nanoparticles array is fabricated. Due to the surface plasma effect of Sn nanoparticles with suitable sizes, the photodetection characteristics of β-Ga2O3 solar-blind photodetector, including light to dark current ratio, responsivity and detectivity, have been successfully doubled, resulting in ultrahigh sensitivity. This work provides an alternative technique to realize low-cost, high-performance and solar-blind photodetectors.