{"title":"相移干涉测量技术综述","authors":"J. Wyant","doi":"10.1364/oft.1984.wda3","DOIUrl":null,"url":null,"abstract":"While phase shifting interferometry (PSI) techniques are not new, they date back at least to the 1950's1 and 1960's2, there is currently much interest in the use of PSI techniques for interferometric optical testing. This interest is at least partly due to the availability of both one-dimensional and two-dimensional solid state detector arrays and microprocessors.","PeriodicalId":170034,"journal":{"name":"Workshop on Optical Fabrication and Testing","volume":"242 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Review of Phase Shifting Interferometry\",\"authors\":\"J. Wyant\",\"doi\":\"10.1364/oft.1984.wda3\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"While phase shifting interferometry (PSI) techniques are not new, they date back at least to the 1950's1 and 1960's2, there is currently much interest in the use of PSI techniques for interferometric optical testing. This interest is at least partly due to the availability of both one-dimensional and two-dimensional solid state detector arrays and microprocessors.\",\"PeriodicalId\":170034,\"journal\":{\"name\":\"Workshop on Optical Fabrication and Testing\",\"volume\":\"242 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Workshop on Optical Fabrication and Testing\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/oft.1984.wda3\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Workshop on Optical Fabrication and Testing","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/oft.1984.wda3","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
While phase shifting interferometry (PSI) techniques are not new, they date back at least to the 1950's1 and 1960's2, there is currently much interest in the use of PSI techniques for interferometric optical testing. This interest is at least partly due to the availability of both one-dimensional and two-dimensional solid state detector arrays and microprocessors.
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