新型大功率红色激光二极管横向结构

M. Dumitrescu, S. Orsila, P. Savolainen, M. Toivonen, M. Pessa
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引用次数: 2

摘要

在经典的分离约束(SCH)量子阱(QW)半导体激光二极管结构中,许多期望的性能是通过结构参数相互耦合的,即结构参数的修改导致一种或多种激光性能的改善,将导致至少另一种性能的恶化。在对这种矛盾耦合进行分析的基础上,提出了一种新的横向层结构,以缓解这一问题并提高激光器的性能。采用光学模拟和完全自洽模型相结合的设计优化方法,推导了新型横向结构的简单评价和优化准则。采用全固体源分子束外延技术(SS-MBE)制备了高功率边发射GazIn1-zP/(AlxGa1- x)yIn1-yP/GaAs量子阱激光器结构,获得了优异的性能(670 nm连续输出功率为3 W, 650 nm连续输出功率为2 W, 630 nm连续输出功率为1 W;阈值电流密度为:670 nm为350 - 450埃/cm2, 650 nm为500 - 540 A/cm2, 630 nm为600 - 680 A/cm2)。虽然只实现了少数优化功能,但对制备结构的测量和模拟之间的良好一致性表明,模拟预测的显著性能改进仍然是可能的。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Novel high-power red laser diode transverse structure
In the already classical separate confinement (SCH) quantum well (QW) semiconductor laser diode structures many of the desired performances are contradictory coupled through the structural parameters -- i.e. a structural parameter modification leading to the improvement of one or more laser performances will produce the deterioration of at least another performance. Based on an analysis of this contradictory coupling a novel transverse layer structure that alleviates the problem and enables improved laser diode performances is proposed. Both optical simulation and a fully self-consistent model are used in a design optimization methodology and simple evaluation and optimization criteria for the new transverse structure are derived. A number of the analyzed high-power edge-emitting GazIn1-zP/(AlxGa1- x)yIn1-yP/GaAs quantum well laser structures were prepared using all-solid-source molecular beam epitaxy (SS-MBE) for layer growth and remarkable performances were obtained (continuous wave output powers of 3 W at 670 nm, 2 W at 650 nm, and 1 W at 630 nm; threshold current densities of 350 - 450 Angstrom/cm2 for 670 nm, 500 - 540 A/cm2 for 650 nm, and 600 - 680 A/cm2 for 630 nm). Although only a few of the optimization features were implemented the good agreement between measurements and simulations for the prepared structures indicate that significant performance improvements -- predicted by the simulations -- are still possible.
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