建立了MEMS陀螺仪中光束各向异性弹性的综合模型，重点研究了轴向非垂直刻蚀对光束各向异性弹性的影响

2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2018-03-26 DOI:10.1109/ISISS.2018.8358126

M. Izadi, F. Braghin, D. Giannini, D. Milani, F. Resta, M. Brunetto, L. Falorni, G. Gattere, L. Guerinoni, C. Valzasina

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引用次数: 3

摘要

本文描述了一种综合的方法来建模和有效地模拟MEMS陀螺仪在光束的非弹性存在下的行为，这种非弹性导致了面外机械正交。特别的重点是非垂直蚀刻沿弯曲梁的轴向的影响，这在文献中已经很少研究。开发了一种设备级数值模拟工具，用于评估梁的各向异性弹性对正交的影响，并通过与三维有限元模拟的比较验证了该工具的有效性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A comprehensive model of beams' anisoelasticity in MEMS gyroscopes, with focus on the effect of axial non-vertical etching

This paper describes a comprehensive approach to model and efficiently simulate the behavior of MEMS gyroscopes in presence of beams' anisoelasticity, that causes out-of-plane mechanical quadrature. Special focus is given to the effects of non-vertical etching along the axial direction of flexural beams, which have been poorly investigated in the literature. A device-level numerical simulation tool to evaluate the effects of beams' anisoelasticity on quadrature is developed and validated through the comparison with 3D FEM simulations.

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2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)

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