{"title":"表面声波马达中一种新型反射器的评价","authors":"Deqing Kong, M. Kurosawa","doi":"10.1109/ULTSYM.2014.0212","DOIUrl":null,"url":null,"abstract":"To study the efficiency of the substrate in a surface acoustic wave motor, a novel interdigital transducer reflector will be designed in this research. Then, to evaluate the performance of the novel stator, the stator is fabricated with the aid of the basic semiconductor planar process. At last, some measurements, including the recycle efficiency and vibration amplitude, are introduced.","PeriodicalId":153901,"journal":{"name":"2014 IEEE International Ultrasonics Symposium","volume":"61 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-10-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"Evaluation of a novel reflector in a surface acoustic wave motor\",\"authors\":\"Deqing Kong, M. Kurosawa\",\"doi\":\"10.1109/ULTSYM.2014.0212\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"To study the efficiency of the substrate in a surface acoustic wave motor, a novel interdigital transducer reflector will be designed in this research. Then, to evaluate the performance of the novel stator, the stator is fabricated with the aid of the basic semiconductor planar process. At last, some measurements, including the recycle efficiency and vibration amplitude, are introduced.\",\"PeriodicalId\":153901,\"journal\":{\"name\":\"2014 IEEE International Ultrasonics Symposium\",\"volume\":\"61 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2014-10-23\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2014 IEEE International Ultrasonics Symposium\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ULTSYM.2014.0212\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 IEEE International Ultrasonics Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ULTSYM.2014.0212","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Evaluation of a novel reflector in a surface acoustic wave motor
To study the efficiency of the substrate in a surface acoustic wave motor, a novel interdigital transducer reflector will be designed in this research. Then, to evaluate the performance of the novel stator, the stator is fabricated with the aid of the basic semiconductor planar process. At last, some measurements, including the recycle efficiency and vibration amplitude, are introduced.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
