{"title":"一种完善lst切割石英泄漏表面声波特性的方法","authors":"T. Watanabe","doi":"10.1109/ULTSYM.2002.1193345","DOIUrl":null,"url":null,"abstract":"If the influence of the electrode film thickness is not considered, the propagation loss can suppress the variation quantity by selecting the cut angle of LST-cut at a practical level at the Rayleigh wave level. The problem which should be solved is an electrode film thickness dependency of the leaky surface acoustic wave on LST-cut quartz. IDT is spatially formed as a method of solving this problem, and the method of exciting the leaky surface acoustic wave is examined. The change of the frequency is 20 ppm within the range of the temperature from - 30/spl deg/C to +110/spl deg/C.","PeriodicalId":378705,"journal":{"name":"2002 IEEE Ultrasonics Symposium, 2002. Proceedings.","volume":"45 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-10-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":"{\"title\":\"An approach to perfection of the characteristics of leaky surface acoustic wave on LST-cut quartz\",\"authors\":\"T. Watanabe\",\"doi\":\"10.1109/ULTSYM.2002.1193345\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"If the influence of the electrode film thickness is not considered, the propagation loss can suppress the variation quantity by selecting the cut angle of LST-cut at a practical level at the Rayleigh wave level. The problem which should be solved is an electrode film thickness dependency of the leaky surface acoustic wave on LST-cut quartz. IDT is spatially formed as a method of solving this problem, and the method of exciting the leaky surface acoustic wave is examined. The change of the frequency is 20 ppm within the range of the temperature from - 30/spl deg/C to +110/spl deg/C.\",\"PeriodicalId\":378705,\"journal\":{\"name\":\"2002 IEEE Ultrasonics Symposium, 2002. Proceedings.\",\"volume\":\"45 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2002-10-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2002 IEEE Ultrasonics Symposium, 2002. Proceedings.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ULTSYM.2002.1193345\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2002 IEEE Ultrasonics Symposium, 2002. Proceedings.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ULTSYM.2002.1193345","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
An approach to perfection of the characteristics of leaky surface acoustic wave on LST-cut quartz
If the influence of the electrode film thickness is not considered, the propagation loss can suppress the variation quantity by selecting the cut angle of LST-cut at a practical level at the Rayleigh wave level. The problem which should be solved is an electrode film thickness dependency of the leaky surface acoustic wave on LST-cut quartz. IDT is spatially formed as a method of solving this problem, and the method of exciting the leaky surface acoustic wave is examined. The change of the frequency is 20 ppm within the range of the temperature from - 30/spl deg/C to +110/spl deg/C.
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