Two-dimensional conveyance system using cooperative motions of many microactuators

We have proposed the concept of distributed micro motion systems (DMMS) in order to coordinate simple motions of many microactuators arranged on a wafer so as to perform a more complicated task. A two-dimensional conveyance system in a plane is studied as an example of DMMS. A system design has been presented with the aim of controlling many microactuators in a similar way as the cellular automaton. In this paper, we focus on a microactuator and define a micro-axel as an elemental unit of DMMS. We have previously reported the development and operation of a one-dimensional conveyance system using a fluidic micro-axel array. We improved the conveyance system and developed a two-dimensional system to perform a positioning task. This paper describes the design, fabrication, and operation of a fluidic micro-axel array for the two-dimensional conveyance system. The experiments to convey objects to the fixed desired position by the fabricated two-dimensional conveyance system performed successfully.