测量系统分析

A. Shaji
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引用次数: 64

摘要

半导体制造商不断受到质量和产品定制需求增加的挑战,成本更低,周转时间更快。制造工程师需要一个系统、快速和可靠的方法来做出决策,以确保测量系统(MS)处于良好的状态。测量系统分析(MSA)由已建立的统计工具组成,以确保测量设置在可接受的条件下,以满足制造能力和客户需求。这些工具(线性度、稳定性、量具重复性和再现性(GRR)和δ相关性(deltaCor))已成功应用于马来西亚德州仪器公司(TIM)的质谱中。这也增加了TIM对MS的信心和客户对收到的零件质量的满意度。这些工具符合ISO9001和TS16949汽车标准。这些工具的实施大大提高了首次通过率,检测和修复ATE异常,并加快了安装时间[Tilden, 2003]。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Measurement system analysis
Semiconductor manufacturers are constantly challenged by increased demand in quality and product customization at lower cost and faster turn around time. Manufacturing engineers need a systematic, fast and reliable methodology to make decisions to ensure that the Measurement System (MS) is in excellent condition. The Measurement System Analysis (MSA) consists of established statistical tools deployed to ensure that the measurement setups are within an acceptable condition to meet manufacturing capabilities and customer requirements. These tools (Linearity, Stability, Gauge Repeatability and Reproducibility (GRR) and Delta Correlation (deltaCor)) were successfully implemented into the MS in Texas Instruments Malaysia (TIM). It also increases TIM's confidence with the MS and customers satisfaction with the quality of parts received. These tools are in compliance with ISO9001 and TS16949 Automotive Standards. Implementation of these tools have dramatically improved first pass yields, detect and fix ATE abnormalities, and speed up setup time [Tilden, 2003].
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