用pv反射计监测硅太阳能电池过程

Conference Record of the Twenty-Eighth IEEE Photovoltaic Specialists Conference - 2000 (Cat. No.00CH37036) Pub Date : 2000-09-15 DOI:10.1109/PVSC.2000.915769

B. Sopori, Yi Zhang, Wei Chen, J. Madjdpour

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引用次数: 12

摘要

研制了一种用于光伏工业过程控制和监测的新型仪器——光伏反射计。该系统可以快速测量整个晶圆/晶胞的一系列参数平均值。本文介绍了该仪器的主要特点及其在监测各种硅太阳能电池制造过程中的应用，包括锯切、纹理、AR涂层和前后金属化。

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Silicon solar cell process monitoring by PV-reflectometer

A new instrument, the PV-reflectometer, is developed for process control and monitoring in PV industry. This system can rapidly measure a host of parameters averaged over the entire wafer/cell. Here we describe the main features of the instrument and its applications for monitoring various Si solar cell fabrication processes, including sawing, texturing, AR coating, and front and back metallization.

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Conference Record of the Twenty-Eighth IEEE Photovoltaic Specialists Conference - 2000 (Cat. No.00CH37036)

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