脉冲激光生长氧化薄膜液滴形成机理研究

V. Craciun, D. Craciun, M. Bunescu, E. Vasile, A. Ioncea, R. Dabu, I. Boyd
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引用次数: 0

摘要

研究了脉冲激光沉积薄膜过程中,亚表面爆炸沸腾机制对液滴形成的作用。对于能量低于目标光学带隙的光子,hvEg表面的扰动要小得多。在这两种情况下,激光照射目标内部温度分布的深度轮廓估计也有很大的不同。当光学吸收系数(OAC)值(alpha) < 5 X 104 cm-1时,形成一层较厚的液体,其最高温度位于表面以下的某一点。在形成空腔的同时,发现生长薄膜表面的液滴密度增加了几个数量级,这表明目标OAC、温度分布、空腔的存在和高液滴密度之间存在明确的联系。长时间激光烧蚀过程中OAC值的降低也可以解释在生长La0.5Sr0.5CoO3薄膜时所观察到的液滴密度逐渐增加的原因。基于这些结果,我们认为在激光照射条件下生长的薄膜表面的液滴中有很大一部分是由爆炸的亚表面沸腾机制引起的,其中OAC小于5 X 104 cm-1。
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Mechanisms of droplet formation in pulsed laser growth of thin oxide films
The role of the sub-surface explosive boiling mechanism for droplet formation during the pulsed laser deposition of thin films has been examined. For photons with an energy lower than the target optical band-gap, hvEg the surface was much less perturbed. Depth-profile estimations of the temperature profiles inside the laser irradiated targets were also quite different for these two cases. For low optical absorption coefficient (OAC) values, (alpha) < 5 X 104 cm-1, a thick layer of liquid formed whose maximum temperature was located at some point below the surface. Simultaneous to the cavity formation, the droplet density on the surface of the grown films was found to increase by orders of magnitude, indicating a clear connection between the target OAC, the temperature profile, the presence of the cavities and a high droplet density. The decrease of the OAC value during prolonged laser ablation could also explain the gradual increase of the droplet density observed when growing La0.5Sr0.5CoO3 films. Based on these results, we suggest that an important fraction of the droplets on the surface of films grown under laser irradiation conditions where the OAC is smaller than 5 X 104 cm-1 is caused by an explosive sub-surface boiling mechanism.
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