基于碳纳米管直径变化影响的碳纳米管器件性能分析

M. F. Abdul Hadi, H. Hussin, M. Muhamad, N. Alias
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引用次数: 1

摘要

目前,由于其物理限制,集成电路行业面临着继续缩小MOSFET技术尺寸的困难。因此,用碳纳米管(CNT)取代硅可能会为半导体工业开辟一条新的道路,因为它体积小,电性能更好。因此,本项目利用SILVACO ATLAS软件开发Gate全能CNTFET。该软件可以分析指定CNTFET结构的电气行为,并提供洞察与设备操作相关的内部物理机制。因此,可以提取其中一个响应变量,如导通电流(Ion)、关断电流(Ioff)、电流比(Ion/Ioff)、阈值电压(Vth)、亚阈值斜率(SS)和漏极诱导势垒降低(DIBL)。在此CNTFET设计中,当使用更高的CNT直径(4.0 nm)时,记录的最高电流比为7.297 \乘以10^6 \math {A}$。电流比的较大值由关断电流的最小值$4.535 \乘以10^{-14}\mathrm{A}$贡献。当碳纳米管直径为8.0 nm时,由于阈值电压为1.21 V,导通电流最高,为4.922 × 10^{-6}$。4.0 nm的DIBL和SS值也最低,分别为0.00613 V/V和0.0613 V/dec。由于半导体行业要求拥有更小的器件技术和更好的性能,因此对CNTFET设计参数的深入研究将显著影响器件的性能。因此,本研究表明碳纳米管材料具有在场效应管设计中实现的潜力。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Analysis on the Performance of CNTFET Devices Based on the Impact of CNT Diameter Variation
Currently, the IC industry is facing difficulties to continue scaling down the size of MOSFET technology due its physical limitation. Thus, replacing silicon with carbon nanotube (CNT) may potentially pave a new way to the semiconductor industries because of its small size and better electrical properties. Therefore, this project utilized SILVACO ATLAS software to develop a Gate All-around CNTFET. This software can analyze the electrical behaviors of specified CNTFET structures and provides insight into the internal physical mechanisms associated with the device operation. Hence, the one of the response variables can be extracted such as on-current (Ion), off-current (Ioff), current ratio (Ion/Ioff), threshold voltage (Vth), subthreshold slope (SS) and Drain Induced Barrier Lowering (DIBL). In this CNTFET design, the highest current ratio recorded is $7.297 \times 10^6 \mathrm{A}$ when using higher CNT diameter which is 4.0 nm. The larger value of current ratio is contributed by the lowest value of off current which is $4.535 \times 10^{-14} \mathrm{A}$. The 8.0 nm of CNT diameter produced highest on-current with $4.922 \times 10^{-6}$ due to the lowest threshold voltage which is 1.21 V. The 4.0 nm also produced the lowest value of DIBL and SS which is 0.00613 V/V and 0.0613 V/dec respectively. Deeper study on the CNTFET design parameter can significantly affect the device performance because of semiconductor industry demand to have a smaller device technology with better performance. Thus, this study shows that CNT material has the potential to be implemented in the design of FET.
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