非球面精度检测装置的综合误差建模

Bo Yu, Guilong Wang, Litao Wang, Zhi-hong Chen
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引用次数: 0

摘要

针对现有非球面检测设备存在的不足,提出了一种基于最接近圆法的非球面检测新原理,详细介绍了基于最接近圆原理的非球面精密探测器的总体结构,通过理论分析建立了探测器的拓扑结构和低序阵,并对探测装置坐标系进行了具体设置。同时,应用多体系统理论,针对非球面形状探测器各部件之间的自由度分布和集合广义坐标系,建立了非球面形状探测器相邻体之间的理想变换矩阵和零级运动方程。最后,综合建立了探测器的误差模型,并对数学模型的正确性进行了检验,为后续的误差补偿研究奠定了坚实的基础。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
The Comprehensive Error Modeling of Aspheric Surface Accuracy Detection Device
In view of the shortcomings of the current aspheric surface detection equipment, a new aspheric surface detection principle based on the most approximate circle method is proposed, the general structure of the aspheric surface precision detector based on the principle of the closest circle is introduced in detail, and the topology and low sequence array of the detector are established through theoretical analysis, and carries on the detection device coordinate system the concrete setting. At the same time, applying the theory of multi-body system, aiming at the distribution of degrees of freedom among the parts of aspheric surface shape detector and the set generalized coordinate system, the ideal transformation matrix and zero-order motion equation between adjacent bodies of aspheric surface shape detector are established. Finally, the error model of the detector is synthetically established, and the correctness of the mathematical model is checked, it lays a solid foundation for the follow-up error compensation research.
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