表面活性剂介导的高应变III-V型半导体异质结构的分子束外延

É. Tournié, K. Ploog, N. Grandjean, J. Massies
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引用次数: 1

摘要

应变层异质结构(SLHs)的外延生长目前正受到强烈的研究,这是由于人们希望获得不同于结构单个成分的新物理性质。许多工作都是针对控制外延形貌,即应变层的生长模式,因为这最终决定了SLHs的性质。表面活性剂介导的分子束外延(SM-MBE)是最近发展起来的一种技术来应对这一挑战。我们总结了该方法在III-V级SLHs领域取得的主要成果。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Surfactant-mediated molecular-beam epitaxy of highly-strained III-V semiconductor heterostructures
The epitaxial growth of strained-layer heterostructures (SLHs) is currently under intense investigation, driven by the desire to obtain new physical properties different from those of the individual constituents of the structure. Much work is directed toward controlling the epitaxial morphology, i.e. the growth mode, of strained layers because this eventually governs the properties of SLHs. Surfactant-mediated molecular-beam epitaxy (SM-MBE) is a technique recently developed to face this challenge. We summarize the main results achieved with this approach in the field of III-V SLHs.<>
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