螺旋线圈溅射屏蔽材料磁场屏蔽效能的测量、仿真及数学估计

2018 IEEE Symposium on Electromagnetic Compatibility, Signal Integrity and Power Integrity (EMC, SI & PI) Pub Date : 2018-07-01 DOI:10.1109/EMCSI.2018.8495438

Kyunghwan Song, Subin Kim, Seungtaek Jeong, Dong-Hyun Kim, Kyungjune Son, Jin Heo, K. Han, Yusup Jung, Hongseok Kim, Joungho Kim

{"title":"螺旋线圈溅射屏蔽材料磁场屏蔽效能的测量、仿真及数学估计","authors":"Kyunghwan Song, Subin Kim, Seungtaek Jeong, Dong-Hyun Kim, Kyungjune Son, Jin Heo, K. Han, Yusup Jung, Hongseok Kim, Joungho Kim","doi":"10.1109/EMCSI.2018.8495438","DOIUrl":null,"url":null,"abstract":"Recently, semiconductor devices are becoming more diverse and scaled down for various applications such as electronic devices, communication systems and automotive components. Such applications can utilize sputtered shielding structures to solve electromagnetic interference (EMI) issues. To reduce the EMI issues, copper and nickel are commonly used as sputtered shielding materials. To analyze the shielding effectiveness, we applied the Schelkunoff's theory. For the verification of the Schelkunoff's theory, we simulated and measured the shielding effectiveness of copper and nickel at the frequency range between 100 kHz and 10 MHz using two identical coils.","PeriodicalId":120342,"journal":{"name":"2018 IEEE Symposium on Electromagnetic Compatibility, Signal Integrity and Power Integrity (EMC, SI & PI)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"9","resultStr":"{\"title\":\"Measurement, Simulation and Mathematical Estimation of Magnetic Field Shielding Effectiveness of Sputtered Shielding Materials using Spiral Coils\",\"authors\":\"Kyunghwan Song, Subin Kim, Seungtaek Jeong, Dong-Hyun Kim, Kyungjune Son, Jin Heo, K. Han, Yusup Jung, Hongseok Kim, Joungho Kim\",\"doi\":\"10.1109/EMCSI.2018.8495438\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Recently, semiconductor devices are becoming more diverse and scaled down for various applications such as electronic devices, communication systems and automotive components. Such applications can utilize sputtered shielding structures to solve electromagnetic interference (EMI) issues. To reduce the EMI issues, copper and nickel are commonly used as sputtered shielding materials. To analyze the shielding effectiveness, we applied the Schelkunoff's theory. For the verification of the Schelkunoff's theory, we simulated and measured the shielding effectiveness of copper and nickel at the frequency range between 100 kHz and 10 MHz using two identical coils.\",\"PeriodicalId\":120342,\"journal\":{\"name\":\"2018 IEEE Symposium on Electromagnetic Compatibility, Signal Integrity and Power Integrity (EMC, SI & PI)\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-07-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"9\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2018 IEEE Symposium on Electromagnetic Compatibility, Signal Integrity and Power Integrity (EMC, SI & PI)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/EMCSI.2018.8495438\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 IEEE Symposium on Electromagnetic Compatibility, Signal Integrity and Power Integrity (EMC, SI & PI)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/EMCSI.2018.8495438","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 9

摘要

最近，半导体器件正变得越来越多样化和缩小各种应用，如电子设备，通信系统和汽车零部件。这种应用可以利用溅射屏蔽结构来解决电磁干扰(EMI)问题。为了减少电磁干扰问题，通常使用铜和镍作为溅射屏蔽材料。为了分析屏蔽效果，我们采用了舍尔库诺夫理论。为了验证Schelkunoff的理论，我们使用两个相同的线圈模拟和测量了铜和镍在100 kHz和10 MHz频率范围内的屏蔽效果。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Measurement, Simulation and Mathematical Estimation of Magnetic Field Shielding Effectiveness of Sputtered Shielding Materials using Spiral Coils

Recently, semiconductor devices are becoming more diverse and scaled down for various applications such as electronic devices, communication systems and automotive components. Such applications can utilize sputtered shielding structures to solve electromagnetic interference (EMI) issues. To reduce the EMI issues, copper and nickel are commonly used as sputtered shielding materials. To analyze the shielding effectiveness, we applied the Schelkunoff's theory. For the verification of the Schelkunoff's theory, we simulated and measured the shielding effectiveness of copper and nickel at the frequency range between 100 kHz and 10 MHz using two identical coils.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2018 IEEE Symposium on Electromagnetic Compatibility, Signal Integrity and Power Integrity (EMC, SI & PI)

自引率

0.00%

发文量