基于InP衬底的低损耗光子晶体波导的制备与表征

OFC/NFOEC Technical Digest. Optical Fiber Communication Conference, 2005. Pub Date : 2005-03-06 DOI:10.1109/OFC.2005.192520

G. Duan, C. Cuisin, E. Derouin, O. Drisse, L. Legouezigou, O. LeGouezigou, F. Pommereau, Y. Gottesman, E. Rao, B. Wild, R. Houdré

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引用次数: 1

摘要

采用电感耦合等离子体刻蚀工艺在InP衬底上制备的光子晶体波导，在缺失一行时传输损耗为40dB/mm，缺失三行时传输损耗小于10 dB/mm。

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Fabrication and characterization of low loss photonic crystal waveguides based on InP substrate

Photonic crystal waveguides, fabricated on InP substrate using an inductively coupled plasma etching process, show propagation losses of 40dB/mm with one missing row and of less than 10 dB/mm with three missing rows.

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OFC/NFOEC Technical Digest. Optical Fiber Communication Conference, 2005.

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