基于InP衬底的低损耗光子晶体波导的制备与表征

OFC/NFOEC Technical Digest. Optical Fiber Communication Conference, 2005. Pub Date : 2005-03-06 DOI:10.1109/OFC.2005.192520

G. Duan, C. Cuisin, E. Derouin, O. Drisse, L. Legouezigou, O. LeGouezigou, F. Pommereau, Y. Gottesman, E. Rao, B. Wild, R. Houdré

{"title":"基于InP衬底的低损耗光子晶体波导的制备与表征","authors":"G. Duan, C. Cuisin, E. Derouin, O. Drisse, L. Legouezigou, O. LeGouezigou, F. Pommereau, Y. Gottesman, E. Rao, B. Wild, R. Houdré","doi":"10.1109/OFC.2005.192520","DOIUrl":null,"url":null,"abstract":"Photonic crystal waveguides, fabricated on InP substrate using an inductively coupled plasma etching process, show propagation losses of 40dB/mm with one missing row and of less than 10 dB/mm with three missing rows.","PeriodicalId":265561,"journal":{"name":"OFC/NFOEC Technical Digest. Optical Fiber Communication Conference, 2005.","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2005-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Fabrication and characterization of low loss photonic crystal waveguides based on InP substrate\",\"authors\":\"G. Duan, C. Cuisin, E. Derouin, O. Drisse, L. Legouezigou, O. LeGouezigou, F. Pommereau, Y. Gottesman, E. Rao, B. Wild, R. Houdré\",\"doi\":\"10.1109/OFC.2005.192520\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Photonic crystal waveguides, fabricated on InP substrate using an inductively coupled plasma etching process, show propagation losses of 40dB/mm with one missing row and of less than 10 dB/mm with three missing rows.\",\"PeriodicalId\":265561,\"journal\":{\"name\":\"OFC/NFOEC Technical Digest. Optical Fiber Communication Conference, 2005.\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2005-03-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"OFC/NFOEC Technical Digest. Optical Fiber Communication Conference, 2005.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OFC.2005.192520\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"OFC/NFOEC Technical Digest. Optical Fiber Communication Conference, 2005.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OFC.2005.192520","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 1

摘要

采用电感耦合等离子体刻蚀工艺在InP衬底上制备的光子晶体波导，在缺失一行时传输损耗为40dB/mm，缺失三行时传输损耗小于10 dB/mm。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Fabrication and characterization of low loss photonic crystal waveguides based on InP substrate

Photonic crystal waveguides, fabricated on InP substrate using an inductively coupled plasma etching process, show propagation losses of 40dB/mm with one missing row and of less than 10 dB/mm with three missing rows.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

OFC/NFOEC Technical Digest. Optical Fiber Communication Conference, 2005.

自引率

0.00%

发文量