自由形式微光学产生定制的光场，以实现最高质量的FPD生产

2006 Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference Pub Date : 2006-05-22 DOI:10.1109/CLEO.2006.4628854

O. Homburg, W. Hill, D. Hauschild, V. Lissotschenko

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引用次数: 0

摘要

综述了利用微光学技术产生顶帽光场和顶帽光线的研究进展。定制的光束形状可以通过自由形式的微光学产生。因此，可以调整光束轮廓，以实现基于激光的FPD生产的最佳工艺参数。

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Free-form micro-optics generate customized light fields for highest-quality FPD production

The generation of top-hat light fields and lines by micro-optics is reviewed. Customized beam shapes can be generated by free-form micro-optics. Thus, the beam profile can be tuned to achieve best process parameters in laser-based FPD production.

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来源期刊

2006 Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference

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