高通道数光相控阵的晶圆级特性

2021 IEEE 17th International Conference on Group IV Photonics (GFP) Pub Date : 2021-12-01 DOI:10.1109/GFP51802.2021.9674016

S. Guerber, D. Fowler, J. Faugier-Tovar, P. Grosse, J. Meilhan, Kim Abdoul Karim, J. Hue, B. Delplanque, F. Simoens, Bertand Szelag

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引用次数: 1

摘要

我们报告了在晶圆级的高通道计数光学相控阵(OPA)的特性。使用改进的探针，256通道OPA已成功校准为+/-25°，无需任何封装步骤，从而允许快速OPA测试。

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Wafer level characterization of high channel count Optical Phased Array

We report on the characterization of a high channel count Optical Phased Array (OPA) at the wafer level. Using a modified prober, a 256 channel OPA has been successfully calibrated for +/-25° without requiring any packaging steps thus allowing for fast OPA testing.

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2021 IEEE 17th International Conference on Group IV Photonics (GFP)

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