{"title":"主轴未对准的MEMS谐振器失配补偿的理论思考","authors":"T. Tsukamoto, Shuji Tanaka","doi":"10.1109/INERTIAL51137.2021.9430491","DOIUrl":null,"url":null,"abstract":"In this paper, a theoretical aspect of frequency and damping mismatch compensation in a MEMS rate integrating gyroscope (RIG) controlled by CW and CCW rotational modes is reported. The mismatches of a resonator could be compensated by the amplitudes and phases of the driving signals, even if the principle axes of stiffness and damping are not aligned to the X-Y coordinate. The proposed theoretical formula well consistent with the previously reported experimental results, as well as the numerical simulation.","PeriodicalId":424028,"journal":{"name":"2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"11 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-03-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Theoretical Consideration of Mismatch Compensation for MEMS Resonator Having Unaligned Principle Axes\",\"authors\":\"T. Tsukamoto, Shuji Tanaka\",\"doi\":\"10.1109/INERTIAL51137.2021.9430491\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, a theoretical aspect of frequency and damping mismatch compensation in a MEMS rate integrating gyroscope (RIG) controlled by CW and CCW rotational modes is reported. The mismatches of a resonator could be compensated by the amplitudes and phases of the driving signals, even if the principle axes of stiffness and damping are not aligned to the X-Y coordinate. The proposed theoretical formula well consistent with the previously reported experimental results, as well as the numerical simulation.\",\"PeriodicalId\":424028,\"journal\":{\"name\":\"2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)\",\"volume\":\"11 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-03-22\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/INERTIAL51137.2021.9430491\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/INERTIAL51137.2021.9430491","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Theoretical Consideration of Mismatch Compensation for MEMS Resonator Having Unaligned Principle Axes
In this paper, a theoretical aspect of frequency and damping mismatch compensation in a MEMS rate integrating gyroscope (RIG) controlled by CW and CCW rotational modes is reported. The mismatches of a resonator could be compensated by the amplitudes and phases of the driving signals, even if the principle axes of stiffness and damping are not aligned to the X-Y coordinate. The proposed theoretical formula well consistent with the previously reported experimental results, as well as the numerical simulation.
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